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Technical Division, School of Engineering, Tohoku University

Instrumental Analysis Group

Home >> Fine- Structure Analysis Section (B01)

Fine- Structure Analysis Section (B01)

   
◇analysis device

   
FT-TEM/STEM, LOW-TEM, FE-SEM/EBSP
XRD, AFM/SPM, GD-OES

  
◇Processing equipment for electron microscopes

   
Ion milling system(Thin film/cross section), Cross section polisher
Grinding/Polishing machine, Precision cutting machine


   
◇Coater

   
Carbon coater, Metal coater


   
◇others

   
Plasma etching, Hydrophilic treatment apparatus, Ion cleaner

Vacuum impregnation system, Dimple grinder, Microtome

Achievements(Journals/Papers)


  • Achievements(Journals/Papers)
  • FE-TEM

    FE-TEM
    Model Hitachi HF-2000
    Accelerate Voltage 200 kV
    Resolution 0.20 nm
    Electron gun Cold-FEG
    Probe mode TEM
    Applications TEM image (Bright Field, Dark Field, High-resolution), Electron Diffraction (SAED, NBD), EDX elemental analysis (point/line/scan, quantitative)
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual HF-2000 operation manual

    FE-TEM/STEM

    FE-TEM/STEM
    Model JEOL JEM-2100F
    Accelerate Voltage 200 kV
    Resolusion Spatial resolution: 0.19 nm, Point resolution: 0.1 nm
    Electron gun Schottky-type FE electron gun
    Probe mode TEM, STEM
    Accessories EDX
    Detectable element: B - U
    Energy resolution: 133 eV
    STEM
    Bottom-mounted CCD camera
    Sample holder
    Beryllium 2 axis inclination
    Applications TEM image (Bright Field, Dark Field, High-resolution), Electron Diffraction (SAED, NBD), EDX elemental analysis (point/line/scan, quantitative)
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    LOW-TEM

    LOW-TEM
    Model Hitachi HT-7500
    Accelerate Voltage 100 kV
    Resolution Spatial resolution: 0.36 nm, Point resolution: 0.20 nm
    Electron gun LaB6, W
    Probe mode TEM
    Accessories Bottom-mounted CCD camera
    Applications TEM image (Bright Field, Dark Field), Electron Diffraction (SAED)
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual HT-7500 operation manual

    FE-SEM

    FE-SEM
    Model JEOL IT-800(HL)
    Accelerate Voltage 1-30 kV
    Resolution 0.7 nm(20kV)
    Electron gun Schottky-type electron gun(Thermal)
    Observation mode Secondary electrons, reflected/backscattered electrons
    Accessories SED
    UED
    EDX
    Backscattered electrons detector
    EBSD
    Applications Morphological observation of ceramics and metals, elemental analysis (point, mapping, qualitative, quantitative)
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    FE-SEM/EBSP

    FE-SEM/EBSP
    Model JEOL JSM-7100F
    Accelerate Voltage 1-30 kV
    Resolution 1.2nm (@30kV), 3.0nm (@1kV)
    Electron gun Schottky-type electron gun(Thermal)
    Observation mode Secondary electrons, reflected/backscattered electrons
    Accessories EDX-SDD
    Backscattered electrons detector
    EBSD
    Applications Morphological observation of ceramics and metals, elemental analysis (point, mapping, qualitative, quantitative).
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    XRD

    XRD  
    Model Rigaku MiniFlex600/600-C
    Radiation source CuKα
    Goniometer Radius 150mm
    Administrator Miyazaki
    Notes Under adjustment

    AFM/SPM

    AFM/SPM
    Model SII Nanocute
    Measurement modes AFM, DFM, Current (Nano, Pico)
    Detection methods self-detecting / optical cantilever
    Resolution X, Y:Within 10 nm, Z:Within 0.5 nm
    Applications Morphological observation in local region of sample surface.
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual AFM-DFM operation manual

    GD-OES (Glow Discharge Optical Emission Spectrometer)

    GD-OES
    Model HORIBA JOBIN YVON, GD-Profiler 2
    Optical emission High Frequency Output: 0 - 300 W, pulse control: 1 - 100 Hz, gas pressure: 0 - 1000 Pa
    Detector Photomultiplier tube
    Spectrometer Polychrometer , monochromator
    Anode diameter ⌀4mm (standard)
    Target elements H -
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Ion milling system

    Ion milling machine
    Model GATAN PIPS Model 691
    Ionization energy 0.5-6.0 keV
    Beam irradiation angle 0.5-10°
    Beam diameter ca. 350µm at 5keV
    Gas Ar
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual PIPS691 operation manual

    Cross section polisher

    Cross section polisher
    Model JEOL IB-19530CP
    Ionization Voltage 2-8kV
    Processing Mode Sample Rotation Mode
    Intermittent Machining Mode
    Finishing mode
    Wide area cross-sectional milling mode
    gas Ar
    Purpose Surface and cross-section finishing of samples for SEM observation
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Grinding/Polishing machine

    Handy lap
    Model LaboPol-5
    Rotational speed 50 - 500 rpm
    Abrasive paper #240 - #8,000
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Precision Grinding/Polishing machine

    Precision rotating polishing machine
    Model Metaserv 250(BUEHLER)
    Rotational speed Max. 500 rpm
    Abrasive paper ⌀200
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Grinding/Polishing machine (Chemical Mechanical Polish)

    Polishing machine
    Model ML-150P
    Rotation speed 30 - 150 rpm
    Abrasive Colloidal silica, diamond slurry
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Precision cutting machine (Low-load/speed)

    Cutting machine
    Model Minitom (Marumoto struers)
    Rotation speed 100 - 420 rpm
    Cut wheel diameter 100 - 127 mm
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Carbon coater

    Carbon coater
    Model CC-40F
    Coating method Thermal vapor deposition
    Target Carbon
    Film thickness nm - sub µm (adjustable by pressure or stage position)
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual Carbon Coater operation manual

    Metal coater

    Metal coaters
    Model JFC-1500
    Coating method Sputtering
    Target Au, Pt
    Coating film thickness nm - sub µm (adjustable by sputtering pressure)
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual Metal Coater operation manual

    Hydrophilic treatment apparatus

    Plasma etching hydrophilic treatment apparatus
    Model SEDE-MN
    Gas Nitrogen, oxygen
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
    Operation manual SEDE-MN Operation manual

    Ion cleaner

    Ion cleaner
    Model JIC-410 (JEOL)
    Discharge method Horizontal electrode type
    Target Carbon
    Vacuum chamber O.D. 118mm x height 37mm
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Vacuum impregnation system

    Vacuum impregnation system
    Model Cast N
    Pressure during use 7×104 Pa
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Dimple grinder

    Dimple grinder
    Model Gatan Model 656
    Rotation speed 10 rpm
    Grinding Wheel Speed 0 - 600 rpm
    Load 0 - 40g
    Final sample thickness 10µm
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Microtome

    Microtome
    Model Leica VT1000 S
    Specification Vibrating microtome
    Sample size MAX 70x40x15mm
    Sample vertical stroke MAX 15mm
    Sectioning range MAX 40mm
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations

    Tabletop cutting machine

    Tabletop cutting machine
    Model MEIHAN MUS-4SA
    Number of revolutions 400 - 3000 rpm
    Cutting wheel diameter 100mm
    Sample vertical stroke MAX 15mm
    Administrator Miyazaki
    Notes Please contact administrator for sample preparations and operations
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